Ceramic Micropore Chuck adopts microporous ceramic material by special technology, which has uniform pore size distribution, and internal interconnection. After grinding, the surface is smooth and delicate and has good flatness. It is widely …

The electrostatic microporous ceramic chuck is a key part of the deep silicon etching machine. The electrostatic adsorption technology used is an advantageous technology that replaces the traditional mechanical clamping and vacuum adsorption meth…